B DIFF/P DIFF/Oxidation/LP Load-and-Unload Automation

B DIFF/P DIFF/Oxidation/LP Load-and-Unload Automation

B DIFF/P DIFF/Oxidation/LP Load-and-Unload Automation

Description

Primarily used in the manufacturing process of semiconductor and solar cells to achieve automatic loading and unloading of silicon wafers between quartz boats and cassettes.

1.Automated loading and unloading: Automatically removes processed wafers from quartz boats and places them into cassettes, and vice versa for unprocessed wafers. This achieves fully automated material handling and reduces manual intervention.
2.High-precision positioning and gripping: Employs precise mechanical structures and control systems to ensure accurate wafer gripping and placement, preventing wafer damage. The equipment operates stably and reliably with a breakage rate ≤ 0.01%.
3.Equipment compatibility: Compatible with all mainstream equipment on the market and supports wafer sizes ranging from 18X to 230 mm, offering strong versatility and adaptability.
4.High throughput and stability: Delivers high throughput to meet mass production demands, with uptime ≥ 99%, ensuring continuous and stable operation of the production line.

Parameter
  • Product DimensionsL8450 mm (including conveyor line) × W3200 mm × H3262 mm
  • ThroughputFull cell 12,000 pcs/h
  • Uptime≥99%
  • Breakage≤0.01%
  • Wafer Load18X-230mm
  • Optional1. Incoming cassette breakage detection 2. Quartz boat breakage detection 3. Sheet resistance measurement 4.Film thickness measurement
Highlights
  • Gantry-type wafer loading and unloading system + six-axis robot arm to transport cassettes, dual working stations to switch between loading and unloading wafers for high production capacity
  • Standardized modular programming, comprehensive detection and alarm system to ease the troubleshooting process
  • Contact parts such as suction cups and stoppers made of special materials and processing techniques to reduce damage on the silicon wafer
  • Compatible with manual and AGV load-and-unload, optional MES function.
  • High tolerance with warped cells, suitable for BC solar cells