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ALD Load-and-Unload Automation
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Automation
/ ALD Load-and-Unload Automation
ALD Load-and-Unload Automation
Datasheet
Parameter
Model
LADA22000RL
Throughput
22000PCS/H(@182),20000PCS/H(210)
Applicable
ALD load-and-unload automation
Uptime
≥99%
Breakage
≤0.03%
Dimension
16900mm*6800mm*4400mm(inclusive of main tool)
Wafer Size
Compatible with 182-230 various wafer sizes
Optional
Incoming cassette wafer breakage detection
Highlights
Contact parts such as suction cups, stoppers made of special materials and processing techniques to reduce damage on the silicon wafer
Maintenance friendly simple and spacious internal layout design
Compatible with manual and AGV load -and-unload, optional MES function.
High tolerance with warped cells, suitable for BC solar cells