Laser Induced Metallization Equipment

Laser Induced Metallization Equipment

Laser Induced Metallization Equipment

Description

Primarily used to optimize the contact between metal and semiconductors, reducing contact resistance to enhance cell conversion efficiency.

1.Precise destruction of passivation layer: Utilizes laser-induced localized carriers to form a high current density, precisely destroying the local passivation layer to form a silver-silicon alloy contact. This provides an excellent interface for metal contact without damaging the silicon wafer substrate.
2.Optimized metal contact and reduced resistance: Laser-induced processing promotes excellent contact between the metal and silicon wafer, effectively reducing metal-semiconductor contact resistance, thereby enhancing fill factor and conversion efficiency. LAPLACE LIM equipment can achieve an efficiency gain of ≥ 0.3% abs.
3.High throughput: Employs dual-station design for simultaneous laser processing. Processing. Throughput > 9600 pcs/h for 18X; > 9000 pcs/h for 210.
4.High stability and low breakage rate: Reliable operation with an uptime ≥ 98.5%. Low breakage rate: ≤ 0.02% for 18X and ≤ 0.03% for 210.
5.Strong compatibility: Compatible with various wafer sizes and adaptable to multiple formats including TOPCon full cells, multi-cut cells, and 0BB cells.
6.Process monitoring and NG wafer rejection: Features real-time monitoring of process voltage and current, enabling precise rejection of NG wafers to ensure product quality consistency.
7.Flexible laser processing method: Standard configuration includes area scan solution using a large square spot to process the cell surface, featuring low tuning difficulty, high stability and compatibility, and maintenance-free optical path.
8.Process expandability: Compatible with secondary LIM for full cells and multi-cut cells. Compensates for insufficient primary LIM processing or degradation after other processes through differentiated laser treatment, providing an additional efficiency gain of 0.05% abs.

Technical Effect

Laser Induced Metallization Equipment

Parameter
  • Product DimensionsL3100 mm × W3450 mm × H2400 mm
  • Wafer Size18X – 230 mm; thickness 100 – 220 µm
  • Throughput≥ 9600 pcs/h
  • Breakage≤ 0.02% @18X; ≤ 0.03% @210
  • Uptime≥98.5%
  • Laser Power≥300W
  • Pattern Precision±15um
  • Repeatability Precision±10μm
  • Efficiency gain≥0.3%
  • Laser MethodArea scan