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PE Load-and-Unload Automation
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Automation
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PE Load-and-Unload Automation
Datasheet
Parameter
Model
LGA8000
Throughput
8000PCS/H（@182），7000PCS/H（@210）
Uptime
≥99%
Breakage
≤0.03%
Wafer Size
16X~22X（Square or rectangular）
Optional
1. Incoming cassette breakage detection 2. AOI Inspection 3. PE/PL Inspection 4. Wafer warp detection 5. SiNx film refractive index measurement
Highlights
Utilizing boat movement mechanism for simplicity, easier tuning and advantage of less wafer drop, and it is compatible with large-size graphite boats
High-precision absorption components to effectively reduce debris and scratches;
Suction cup can be replaced individually for easy maintenance;
Compatible with manual and AGV load-and-unload, optional MES function;
High tolerance with warped cells, suitable for BC solar cells
